Optical proximity correction system, computer-readable medium and operating method

An optical proximity correction system and an operating method are provided. Provided is an optical proximity correction system comprising, a plurality of patch blocks which include a plurality of patches including a segment information table, a plurality of slave devices which receive the segment i...

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Bibliographische Detailangaben
Hauptverfasser: LEE, HEE-JUN, KIM, SANG-WOOK, OH, HEUNG-SUK, JUNG, JEE-EUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:An optical proximity correction system and an operating method are provided. Provided is an optical proximity correction system comprising, a plurality of patch blocks which include a plurality of patches including a segment information table, a plurality of slave devices which receive the segment information table from the plurality of patch blocks to generate a minimum patch table, and a master device which receives the minimum patch table from the plurality of slave devices, generates a segment average calculation table, and performs an optical proximity correction on the patches recorded in the segment average calculation table.