Alumina-based sintered body and electrostatic chuck

The present invention provides an alumina-based sintered body which is mainly composed of alumina (Al2O3), wherein the content of magnesia (MgO) relative to the content of alumina satisfies 0.00 mol% < MgO ≤ 0.20 mol%. This alumina-based sintered body has a density of 3.96 g/cm3 or more; and the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HOTTA, MOTOKI, MATSUOKA, TAKAYUKI, OGAWA, TAKAMICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!