Alumina-based sintered body and electrostatic chuck

The present invention provides an alumina-based sintered body which is mainly composed of alumina (Al2O3), wherein the content of magnesia (MgO) relative to the content of alumina satisfies 0.00 mol% < MgO ≤ 0.20 mol%. This alumina-based sintered body has a density of 3.96 g/cm3 or more; and the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HOTTA, MOTOKI, MATSUOKA, TAKAYUKI, OGAWA, TAKAMICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LIME, MAGNESIA METALLURGY REFRACTORIES SEMICONDUCTOR DEVICES SLAG TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	The present invention provides an alumina-based sintered body which is mainly composed of alumina (Al2O3), wherein the content of magnesia (MgO) relative to the content of alumina satisfies 0.00 mol% < MgO ≤ 0.20 mol%. This alumina-based sintered body has a density of 3.96 g/cm3 or more; and the standard deviation of the grain sizes of alumina crystal grains is less than 4.0 [mu]m.