Methods for Raman spectroscopy, optical measurement systems and non-transitory computer readable mediums

A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a regi...

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Bibliographische Detailangaben
Hauptverfasser: SHAYARI, AMIR, OREN, YONATAN, SCHLEIFER, ELAD, DEICH, VALERY, BARAK, GILAD, YALOV, SHIMON, HOLLANDER, EYAL
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.