Turbomolecular vacuum pump
Turbomolecular vacuum pump (1) comprising at least one heating rod (20) having at least one holding part (20a) and a heating part (20b) utilizing the Joule effect when the heating rod (20) is electrically powered, the holding part (20a) forming a sheath for the electrical supply wires to the heating...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | Turbomolecular vacuum pump (1) comprising at least one heating rod (20) having at least one holding part (20a) and a heating part (20b) utilizing the Joule effect when the heating rod (20) is electrically powered, the holding part (20a) forming a sheath for the electrical supply wires to the heating part (20b), at least one connection duct (21) being at least partially arranged in a high-pressure stator (19) of the vacuum pump (1) for the passage of the holding part (20a), the heating part (20b) being received along at least one helical groove (14) of the high-pressure stator (19). |
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