Vaporizer
This vaporizer (A) comprises a liquid-raw-material introduction opening (11), a vaporized-raw-material discharge opening (21), a vaporizer body (1), and a heater (5). The vaporizer body (1) is equipped with a vaporization unit (3) extending from the liquid-raw-material introduction opening (11) to t...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | This vaporizer (A) comprises a liquid-raw-material introduction opening (11), a vaporized-raw-material discharge opening (21), a vaporizer body (1), and a heater (5). The vaporizer body (1) is equipped with a vaporization unit (3) extending from the liquid-raw-material introduction opening (11) to the vaporized-raw-material discharge opening (21). A flow path (7) into which a liquid raw material (L) flows is formed in the vaporization unit (3). The flow path (7) is formed such that the flow path area (S) thereof increases with increasing proximity to the vaporized-raw-material discharge opening (21) and distance from the liquid-raw-material introduction opening (11). |
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