Semiconductor device

According to one embodiment, a semiconductor device includes a stacked body in which a plurality of conductive layers including upper conductive layers and lower conductive layers are stacked to be apart from each other in a first direction, and which includes a stairs-shaped end portion, the upper...

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1. Verfasser: ISHIDUKI, MEGUMI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:According to one embodiment, a semiconductor device includes a stacked body in which a plurality of conductive layers including upper conductive layers and lower conductive layers are stacked to be apart from each other in a first direction, and which includes a stairs-shaped end portion, the upper conductive layers functioning as select gate lines for a NAND string, and the lower conductive layers functioning as word lines for the NAND string, a plurality of pillar structures each including a semiconductor layer extending in the first direction through the stacked body, and a first contact connected to two or more first upper conductive layers stacked successively, and provided to extend over upper surfaces of the two or more first upper conductive layers.