Thermal conditioning apparatus and method

A thermal conditioning apparatus, said thermal conditioning apparatus including at least one channel, wherein a thermal conditioning fluid and a solid thermal conductor are disposed within the at least one channel. Also described is a system or sub-system including such a thermal conditioning appara...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SCHNEIDERS, MAURITIUS GERARDUS ELISABETH, KLUGKIST, JOOST ANDRE, JIN, WEN-JIE, DOLK, VICTOR SEBASTIAAN, VAN BERKEL, KOOS, VAN DEN BOOM, JORIS DOMINICUS BASTIAAN JOHANNES
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A thermal conditioning apparatus, said thermal conditioning apparatus including at least one channel, wherein a thermal conditioning fluid and a solid thermal conductor are disposed within the at least one channel. Also described is a system or sub-system including such a thermal conditioning apparatus, and a lithographic apparatus including such a thermal conditioning apparatus, system or sub-system. A method of conditioning a system or sub-system, said method including providing a thermal conditioning fluid and a solid thermal conductor within a channel that is in thermal communication with the system or sub-system, and transferring thermal energy between the system or sub-system and the solid thermal conductor via the thermal conditioning fluid is also provided. The use of such apparatuses or methods is also provided.