Semiconductor process equipment and a wafer support structure thereof

A semiconductor process equipment and a wafer supporting structure thereof. The wafer support structure comprises a lifting component, a support component, an expansion component and an adjustment component, the lifting component comprises a lifting shaft, and the top surface of the lifting shaft is...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHANG, JUN, HUANG, SHOU-LIN, WEI, JING-FENG, SHE, QING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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