Substrate processing apparatus, data processing method, and data processing program

The present invention reduces a workload on a learning task. A substrate processing apparatus includes: a reservoir feature amount generation unit that inputs first sensor data of acquired time series and outputs a reservoir feature amount; a learning unit that in a learning period, learns weighting...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LING, YUANIEH, TSUTSUI, TAKURO, KATAOKA, YUKI, SAITOU, YUKIYA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PHYSICS SEMICONDUCTOR DEVICES
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