Cleaning device
To provide a cleaning device capable of improving supply efficiency of cleaning water to a material to be cleaned by reducing an installation space of a pure water generating device, facilitating water quality management of cleaning water, and simplifying a supply mechanism of cleaning water to the...
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| creator | INAKAZU, SUSUMU TAJIRI, KAZUTAKA |
| description | To provide a cleaning device capable of improving supply efficiency of cleaning water to a material to be cleaned by reducing an installation space of a pure water generating device, facilitating water quality management of cleaning water, and simplifying a supply mechanism of cleaning water to the material to be cleaned. A cleaning device for cleaning a material to be cleaned using cleaning water, recovering waste liquid, and reproducing and circulating pure water comprises: a holding table for holding the material to be cleaned; a cleaning water supply nozzle for supplying cleaning water to the material to be cleaned held on the holding table; a waste liquid tank for storing cleaning water which is used as waste liquid; a waste liquid pump for pumping up the waste liquid from the waste liquid tank; a filter for filtering the waste liquid pumped up by the waste liquid pump and refining the filtered liquid into fresh water; a fresh water tank for storing fresh water; an ultraviolet light source for irradiatin |
| format | Patent |
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A cleaning device for cleaning a material to be cleaned using cleaning water, recovering waste liquid, and reproducing and circulating pure water comprises: a holding table for holding the material to be cleaned; a cleaning water supply nozzle for supplying cleaning water to the material to be cleaned held on the holding table; a waste liquid tank for storing cleaning water which is used as waste liquid; a waste liquid pump for pumping up the waste liquid from the waste liquid tank; a filter for filtering the waste liquid pumped up by the waste liquid pump and refining the filtered liquid into fresh water; a fresh water tank for storing fresh water; an ultraviolet light source for irradiatin</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; DRESSING OR CONDITIONING OF ABRADING SURFACES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ; GRINDING ; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING ; PERFORMING OPERATIONS ; POLISHING ; SEMICONDUCTOR DEVICES ; TRANSPORTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230401&DB=EPODOC&CC=TW&NR=202313256A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230401&DB=EPODOC&CC=TW&NR=202313256A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>INAKAZU, SUSUMU</creatorcontrib><creatorcontrib>TAJIRI, KAZUTAKA</creatorcontrib><title>Cleaning device</title><description>To provide a cleaning device capable of improving supply efficiency of cleaning water to a material to be cleaned by reducing an installation space of a pure water generating device, facilitating water quality management of cleaning water, and simplifying a supply mechanism of cleaning water to the material to be cleaned. 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| language | chi ; eng |
| recordid | cdi_epo_espacenet_TW202313256A |
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| subjects | BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING |
| title | Cleaning device |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-03T10%3A07%3A36IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=INAKAZU,%20SUSUMU&rft.date=2023-04-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ETW202313256A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |