Cleaning device

To provide a cleaning device capable of improving supply efficiency of cleaning water to a material to be cleaned by reducing an installation space of a pure water generating device, facilitating water quality management of cleaning water, and simplifying a supply mechanism of cleaning water to the material to be cleaned. A cleaning device for cleaning a material to be cleaned using cleaning water, recovering waste liquid, and reproducing and circulating pure water comprises: a holding table for holding the material to be cleaned; a cleaning water supply nozzle for supplying cleaning water to the material to be cleaned held on the holding table; a waste liquid tank for storing cleaning water which is used as waste liquid; a waste liquid pump for pumping up the waste liquid from the waste liquid tank; a filter for filtering the waste liquid pumped up by the waste liquid pump and refining the filtered liquid into fresh water; a fresh water tank for storing fresh water; an ultraviolet light source for irradiatin