Semiconductor memory device

Inventive concepts relate to a semiconductor memory device. The semiconductor memory device comprising, a substrate comprising an NMOS region and a PMOS region, a first gate pattern disposed on the NMOS region of the substrate, and a second gate pattern disposed on the PMOS region of the substrate....

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHOI, AH-RANG, KIL, GYU-HYUN, BACK, DOO-SAN, HAN, JUNG-HOON, YOON, CHAN-SIC, KIM, WEON-HONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Inventive concepts relate to a semiconductor memory device. The semiconductor memory device comprising, a substrate comprising an NMOS region and a PMOS region, a first gate pattern disposed on the NMOS region of the substrate, and a second gate pattern disposed on the PMOS region of the substrate. The first gate pattern comprises a first high-k layer, a diffusion mitigation pattern, an N-type work function pattern, and a first gate electrode, which are sequentially stacked on the substrate, the second gate pattern comprises a second high-k layer and a second gate electrode which are sequentially stacked on the substrate, the diffusion mitigation pattern is in contact with the first high-k layer, a stacked structure of the first gate electrode is the same as that of the second gate electrode, and the second gate pattern does not comprise the N-type work function pattern.