Use of signal filtering schemes in high TCR based control

A controller to control a temperature of a first substrate support in a substrate processing system includes a resistance calculation module to calculate a first resistance of a first heater element of a plurality of heater elements of the first substrate support, a temperature calculation module to...

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Bibliographische Detailangaben
Hauptverfasser: CHANDRASEKHARAN, RAMESH, THILAGARAJ, MOHAN, LEESER, KARL FREDERICK
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A controller to control a temperature of a first substrate support in a substrate processing system includes a resistance calculation module to calculate a first resistance of a first heater element of a plurality of heater elements of the first substrate support, a temperature calculation module to calculate a first temperature of the first heater element based on the calculated first resistance, and a filter module to filter a first signal that corresponds to the calculated first resistance. The temperature calculation module selectively causes the filter module to filter the first signal in response to a determination of whether at least one condition associated with operation of the substrate processing system is met.