Clamped dual-channel showerhead

Exemplary dual-channel showerheads may include an upper plate that defines a first plurality of apertures. The showerheads may include a base having a lower plate. The lower plate may define a second plurality of apertures and a third plurality of apertures. Each of the first plurality of apertures...

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Bibliographische Detailangaben
Hauptverfasser: SHEELAVANT, GANGADHAR, HONNAVAR, KIRAN SHYAM, PAL, ANIRUDDHA, KENGUNTI, BASAVARAJA SHANKARAPPA, RAJU, SRIKANTHA, YANG, YAO-HUNG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Exemplary dual-channel showerheads may include an upper plate that defines a first plurality of apertures. The showerheads may include a base having a lower plate. The lower plate may define a second plurality of apertures and a third plurality of apertures. Each of the first plurality of apertures may be fluidly coupled with a respective one of the second plurality of apertures to define a fluid path extending from a top surface of the showerhead through a bottom surface of the showerhead. The base may define a gas inlet that is fluidly coupled with the third plurality of apertures. The base may be detachably coupled with the upper plate using one or more fastening mechanisms. The showerheads may include a compressible gasket positioned between the upper plate and the lower plate.