Diagnostic system, diagnostic method, and computer program
The present disclosure provides a diagnostic system capable of appropriately determining the cause of an error even if it is considered that there are multiple factors or multiple compound factors. The diagnostic system described in this disclosure is provided with a learning device, which associate...
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| Hauptverfasser: | , , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present disclosure provides a diagnostic system capable of appropriately determining the cause of an error even if it is considered that there are multiple factors or multiple compound factors. The diagnostic system described in this disclosure is provided with a learning device, which associates at least one of a formula that specifies operations of an inspection device, a log data that describes the state of the device, and a specimen data that describes characteristics of a specimen with error types of the device for learning. The learning device is used for estimating the cause of the error. |
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