Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor

A roller (100) for transporting a flexible substrate (10) is described. The roller (100) includes a main body (101) having a plurality of gas supply slits (103) provided in an outer surface of the main body (101). The plurality of gas supply slits (103) extends in a direction of a central rotation a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOHLER, BERNHARD, HLADIK, ANNEMARIE, SAUER, ANDREAS, BUSCHBECK, WOLFGANG, ARMSTRONG, CLAIRE, DEPPISCH, THOMAS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES PACKING PERFORMING OPERATIONS STORING TRANSPORTING
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