Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor

Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor

A roller (100) for transporting a flexible substrate (10) is described. The roller (100) includes a main body (101) having a plurality of gas supply slits (103) provided in an outer surface of the main body (101). The plurality of gas supply slits (103) extends in a direction of a central rotation a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KOHLER, BERNHARD, HLADIK, ANNEMARIE, SAUER, ANDREAS, BUSCHBECK, WOLFGANG, ARMSTRONG, CLAIRE, DEPPISCH, THOMAS
Format: Patent
Sprache:chi ; eng
Schlagworte:
CONVEYING
HANDLING THIN OR FILAMENTARY MATERIAL
HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES
PACKING
PERFORMING OPERATIONS
STORING
TRANSPORTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A roller (100) for transporting a flexible substrate (10) is described. The roller (100) includes a main body (101) having a plurality of gas supply slits (103) provided in an outer surface of the main body (101). The plurality of gas supply slits (103) extends in a direction of a central rotation axis (111) of the roller (100). Further, the roller (100) includes a sleeve (104) provided circumferentially around and in contact with the main body (101). The sleeve (104) has a plurality of gas outlets (105) extending in a radial direction (R) and being provided above the plurality of gas supply slits (103).