Semiconductor device and forming method thereof

Semiconductor devices including backside capacitors and methods of forming the same are disclosed. A semiconductor device includes a first transistor structure; a front-side interconnect structure on a front-side of the first transistor structure, the front-side interconnect structure including a fr...

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Bibliographische Detailangaben
Hauptverfasser: CAO, MIN, CHANG, SHANG-WEN, CHIU, YI-HSUN, CHOU, CHIHAO, TSAI, CHING-WEI, WANG, CHIH-HAO
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Semiconductor devices including backside capacitors and methods of forming the same are disclosed. A semiconductor device includes a first transistor structure; a front-side interconnect structure on a front-side of the first transistor structure, the front-side interconnect structure including a front-side conductive line; a backside interconnect structure on a backside of the first transistor structure, the backside interconnect structure including a backside conductive line, the backside conductive line having a line width greater than a line width of the front-side conductive line; and a first capacitor structure coupled to the backside interconnect structure.