Semiconductor device and forming method thereof
Semiconductor devices including backside capacitors and methods of forming the same are disclosed. A semiconductor device includes a first transistor structure; a front-side interconnect structure on a front-side of the first transistor structure, the front-side interconnect structure including a fr...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Semiconductor devices including backside capacitors and methods of forming the same are disclosed. A semiconductor device includes a first transistor structure; a front-side interconnect structure on a front-side of the first transistor structure, the front-side interconnect structure including a front-side conductive line; a backside interconnect structure on a backside of the first transistor structure, the backside interconnect structure including a backside conductive line, the backside conductive line having a line width greater than a line width of the front-side conductive line; and a first capacitor structure coupled to the backside interconnect structure. |
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