Film inspection apparatus, film inspection method and program wherein detection of defects generated in a film can be easily performed without manual monitoring

Detection of defects generated in a film can be easily performed without manual monitoring. In a film inspection device for optically inspecting defects generated in films in an overlaid state, light is irradiated from a light source to an inspection area of a film (step S1), a camera (optical senso...

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Bibliographische Detailangaben
Hauptverfasser: KAWAMURA, YOSUKE, HATAZAWA, SHOTA, SAGAWA, SHOGO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Detection of defects generated in a film can be easily performed without manual monitoring. In a film inspection device for optically inspecting defects generated in films in an overlaid state, light is irradiated from a light source to an inspection area of a film (step S1), a camera (optical sensor) photographs the inspection area of the film to detect stray lights in lights reflected in the inspection area (step S2), and a control unit performs data processing on an output signal of the camera to detect defects (step S5).