Support glass base plate

The invention achieves warp suppression and weight reduction. A support glass base plate 10 has a ratio of the Young's modulus (GPa) over density (g/cm3) of 37.0 (GPa.cm3/g) or higher and is of a larger value than a ratio calculation value, which is the ratio of the Young's modulus (GPa) o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: NAGANO, MIKIO, ONO, KAZUTAKA, TAMAI, KIYOSHI, SAITO, YASUNARI, INABA, SEIJI, KOBAYASHI, YUHA
Format: Patent
Sprache:chi ; eng
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