Support glass base plate

The invention achieves warp suppression and weight reduction. A support glass base plate 10 has a ratio of the Young's modulus (GPa) over density (g/cm3) of 37.0 (GPa.cm3/g) or higher and is of a larger value than a ratio calculation value, which is the ratio of the Young's modulus (GPa) o...

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Bibliographische Detailangaben
Hauptverfasser: NAGANO, MIKIO, ONO, KAZUTAKA, TAMAI, KIYOSHI, SAITO, YASUNARI, INABA, SEIJI, KOBAYASHI, YUHA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention achieves warp suppression and weight reduction. A support glass base plate 10 has a ratio of the Young's modulus (GPa) over density (g/cm3) of 37.0 (GPa.cm3/g) or higher and is of a larger value than a ratio calculation value, which is the ratio of the Young's modulus (GPa) over density (g/cm3), as calculated from the composition. The ratio calculation value is represented by the formula: [alpha] = 2.[Sigma]{(Vi.Gi)/Mi).Xi}. Herein, Vi represents a filling parameter for a metal oxide contained in the support glass base plate 10, Gi represents the energy of dissociation for the metal oxide contained in the support glass base plate 10, Mi represents the molecular weight of the metal oxide contained in the support glass base plate 10, and Xi represents the molar ratio of the metal oxide contained in the support glass base plate 10.