Molded body made of opaque quartz glass and method for producing same

A known method for producing a molded body made of opaque quartz glass comprises the method steps of: (a) providing SiO2 grains obtained by comminuting quartz glass having a purity of at least 99.9 wt% SiO2, (b) forming a slurry which contains a suspension liquid and the SiO2 grains and which has a...

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Hauptverfasser: HAMMERSCHMIDT, JOERG, SCHEICH, GERRIT, HONER, MIRIAM SONJA, GOTZENDORFER, ANDREAS, TSCHOLITSCH, NADINE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A known method for producing a molded body made of opaque quartz glass comprises the method steps of: (a) providing SiO2 grains obtained by comminuting quartz glass having a purity of at least 99.9 wt% SiO2, (b) forming a slurry which contains a suspension liquid and the SiO2 grains and which has a total solids content, (c) wet grinding the SiO2 grains in the slurry so as to form ground SiO2 grain particles, (d) forming a porous green body from the slurry, and (e) sintering the porous green body so as to form the molded body. In order to provide a molded body made of opaque quartz glass proceeding from this, from which components for semiconductor manufacturing having a homogeneous reflectance can be produced at low cost, it is proposed that the wet grinding of the SiO2 grains takes place at least temporarily in the presence of SiO2 nanoparticles, the proportion of which in the total solids content of the slurry is in the range of 0.1 wt% to 10 wt%, and that the slurry has a solids content in the range of 76