Machining apparatus removes grinding debris attached to machining chamber cover so as to clean machining chamber cover at wider range by comparing with a fluid injection from a nozzle

Cleaning the machining chamber cover has a wider range by comparing with a fluid injection from a nozzle. A machining apparatus is provided and comprises: a chuck table holding a workpiece; a machining unit having a spindle and machining the workpiece attracted and held by the chuck table through a...

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description Cleaning the machining chamber cover has a wider range by comparing with a fluid injection from a nozzle. A machining apparatus is provided and comprises: a chuck table holding a workpiece; a machining unit having a spindle and machining the workpiece attracted and held by the chuck table through a machining tool mounted on the lower end portion of the spindle; a machining chamber cover having a top plate and a side wall and covering the sides and the top direction of the chuck table and the machining tool; and a vibration imposing unit having a vibration element and imposing vibration to the side wall and the top plate of the machining chamber cover.
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A machining apparatus is provided and comprises: a chuck table holding a workpiece; a machining unit having a spindle and machining the workpiece attracted and held by the chuck table through a machining tool mounted on the lower end portion of the spindle; a machining chamber cover having a top plate and a side wall and covering the sides and the top direction of the chuck table and the machining tool; and a vibration imposing unit having a vibration element and imposing vibration to the side wall and the top plate of the machining chamber cover.</abstract><oa>free_for_read</oa></addata></record>
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subjects DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
title Machining apparatus removes grinding debris attached to machining chamber cover so as to clean machining chamber cover at wider range by comparing with a fluid injection from a nozzle
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