Machining apparatus removes grinding debris attached to machining chamber cover so as to clean machining chamber cover at wider range by comparing with a fluid injection from a nozzle

Cleaning the machining chamber cover has a wider range by comparing with a fluid injection from a nozzle. A machining apparatus is provided and comprises: a chuck table holding a workpiece; a machining unit having a spindle and machining the workpiece attracted and held by the chuck table through a...

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1. Verfasser: HOSHIKAWA, HIROTOSHI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Cleaning the machining chamber cover has a wider range by comparing with a fluid injection from a nozzle. A machining apparatus is provided and comprises: a chuck table holding a workpiece; a machining unit having a spindle and machining the workpiece attracted and held by the chuck table through a machining tool mounted on the lower end portion of the spindle; a machining chamber cover having a top plate and a side wall and covering the sides and the top direction of the chuck table and the machining tool; and a vibration imposing unit having a vibration element and imposing vibration to the side wall and the top plate of the machining chamber cover.