Substrate conveying mechanism and substrate conveying method

The invention relates to a substrate conveying mechanism and a substrate conveying method. When a substrate conveying mechanism is used for transferring a substrate relative to a stacked processing assembly, adhesion of particles to the substrate can be inhibited, and the substrate can be conveyed i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IIDA, NARUAKI, IDE, KOUSEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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