Substrate conveying mechanism and substrate conveying method

The invention relates to a substrate conveying mechanism and a substrate conveying method. When a substrate conveying mechanism is used for transferring a substrate relative to a stacked processing assembly, adhesion of particles to the substrate can be inhibited, and the substrate can be conveyed in a large range. A substrate transfer mechanism for transferring a substrate to each of a plurality of processing units for processing the substrate and stacked on each other, the substrate transfer mechanism being configured so as to include: a base unit including a first driving device: a lifting unit for lifting the base unit; a first arm part which extends in the lateral direction from the lower side of the base part, and which rotates the distal end part of the first arm part around the longitudinal axis with respect to the base part by means of a first drive device; a second arm part extending in the lateral direction from the upper side of the distal end part of the first arm part, the distal end part of the