Probe card

The purpose of the present invention is to enable easy recognition of an alignment mark formed on a probe by suppressing reflection light from a circuit board in which a light-transmissive insulating film is formed on interlayer wires. This probe card comprises: a circuit board 103 in which an insul...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWASAKI, YUJI, SHIMIZU, TATSUNORI, SHOJI, TSUTOMU, KINOSHITA, TOMOHIRO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The purpose of the present invention is to enable easy recognition of an alignment mark formed on a probe by suppressing reflection light from a circuit board in which a light-transmissive insulating film is formed on interlayer wires. This probe card comprises: a circuit board 103 in which an insulating film 304 and an electrode pad 3 are formed; and a probe 5 attached onto the electrode pad 3. The probe 5 has an alignment mark 7 which is recognizable from the opposite side of the circuit board 103. The alignment mark 7 is positioned on the outer side than the electrode pad 3 on the circuit board 103. The insulating film 304 is a light-transmissive thin film that covers interlayer wires 314. An anti-reflection film 6 that has a lower light transmittance than the insulating film 304 is formed on a portion of a region on the insulating film 304. The anti-reflection film 6 is formed on a region including a position corresponding to the alignment mark 7 and the periphery thereof.