Laser processing apparatus capable of sufficiently collecting dust generated during processing and improving processing quality when drilling and processing a substrate with a laser beam

Laser processing apparatus capable of sufficiently collecting dust generated during processing and improving processing quality when drilling and processing a substrate with a laser beam

An object of the present invention is to provide a laser processing apparatus capable of sufficiently collecting dust generated during processing and improving processing quality when drilling and processing a substrate with a laser beam. The solution of the present invention is that a laser process...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: OSANAI, TAKUMI, ITO, YASUSHI
Format: Patent
Sprache:chi ; eng
Schlagworte:
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
SOLDERING OR UNSOLDERING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:An object of the present invention is to provide a laser processing apparatus capable of sufficiently collecting dust generated during processing and improving processing quality when drilling and processing a substrate with a laser beam. The solution of the present invention is that a laser processing apparatus includes a laser unit for irradiating a laser beam from a front side of a workpiece to process the workpiece, and a mobile stand for moving the workpiece and the laser unit relatively. The laser processing apparatus is characterized by that it comprises an adsorption table adsorbing the workpiece placed on the mobile stand and having a hole with a pattern identical to that of the hole to be processed in the workpiece.