Observation device, under vacuum drying device, display method and storage medium

To improve convenience on the results of imaging of a substrate under vacuum drying. An observation device comprises an imaging unit that captures an image of a substrate under vacuum drying to vacuum-dry a solution on the substrate, and an acquisition unit that acquires a substrate image captured b...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	OIKAWA, JUNJI, ONOUE, KOUTAROU, NASU, TOSHIFUMI, UEDA, TOSHIHIKO, SATAKE, JUN, HAYASHI, TERUYUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To improve convenience on the results of imaging of a substrate under vacuum drying. An observation device comprises an imaging unit that captures an image of a substrate under vacuum drying to vacuum-dry a solution on the substrate, and an acquisition unit that acquires a substrate image captured by the imaging unit, and a state of the vacuum drying by a vacuum drying device, at each point in time during the vacuum drying, together with time information at the point in time.