Method of using sensor-based machine learning to compensate error in mass metrology

Computer-implemented methods and systems of determining systematic error in a mass measurement of a substrate are disclosed. The methods involve providing sensor readings to a machine learning model as inputs and receiving as an output a value for systematic error and/or a corrected mass measurement...

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Bibliographische Detailangaben
Hauptverfasser:	HARRISON, PAUL, OWENS, SAM, ALDEN, EMILY ANN, FENG, YE, SUBRAMANIAN, PRIYADARSINI, ELLIOTT, GREGOR ROBERT
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING WEIGHING
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Beschreibung
Zusammenfassung:	Computer-implemented methods and systems of determining systematic error in a mass measurement of a substrate are disclosed. The methods involve providing sensor readings to a machine learning model as inputs and receiving as an output a value for systematic error and/or a corrected mass measurement. The machine learning model may be continuously checked during production and retrained or replaced based on data collected during production.