Integrated chips and methods for forming the same

In some embodiments, the present disclosure relates to an integrated chip that includes a gate electrode over a substrate, and a gate dielectric layer arranged over the gate electrode. The gate dielectric layer includes a ferroelectric material. An active structure is arranged over the gate dielectr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG, YENIEH, LIN, CHUNG-TE, CHEN, HAIING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:In some embodiments, the present disclosure relates to an integrated chip that includes a gate electrode over a substrate, and a gate dielectric layer arranged over the gate electrode. The gate dielectric layer includes a ferroelectric material. An active structure is arranged over the gate dielectric layer and includes a semiconductor material. A source contact and a drain contact are arranged over the active structure. A capping structure is arranged between the source and drain contacts and over the active structure. The capping structure includes a first metal material.