Test target defect identification and evaluation for assessing quality of component carrier structure

Apparatus (100) for testing quality of a component carrier structure (102), wherein the apparatus (100) comprises a material removal unit (112) configured for removing material of the component carrier structure (102) for exposing a plane in an interior of the component carrier structure (102), a detection unit (162) configured for detecting component carrier structure specific data (in particular image data) of the exposed plane of the component carrier structure (102), a determining unit (114) configured for determining at least one pre-defined test target (116) of the component carrier structure (102) at the exposed plane based on the component carrier structure specific data, and an evaluation unit (118) configured for identifying and evaluating at least one defect of the at least one determined test target (116) for assessing quality of the component carrier structure (102).