Integrated circuit, FinFET MOS capacitor and method for forming the same

Various embodiments of the present disclosure are directed towards a FinFET MOS capacitor. In some embodiments, the FinFET MOS capacitor comprises a substrate and a capacitor fin structure extending upwardly from an upper surface of the substrate. The capacitor fin structure comprises a pair of dumm...

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Bibliographische Detailangaben
Hauptverfasser: HSIAO, RU-SHANG, YANG, SUNG-HSIN, JENG, JUNGI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Various embodiments of the present disclosure are directed towards a FinFET MOS capacitor. In some embodiments, the FinFET MOS capacitor comprises a substrate and a capacitor fin structure extending upwardly from an upper surface of the substrate. The capacitor fin structure comprises a pair of dummy source/drain regions separated by a dummy channel region and a capacitor gate structure straddling on the capacitor fin structure. The capacitor gate structure is separated from the capacitor fin structure by a capacitor gate dielectric.