Power supply device

Provided are a power supply device (31) capable of achieving an increase in power density of a substrate (S) being treated and enhancing power efficiency when sequentially treating multiple substrates (S) during surface treatment of the substrates (S) to which a voltage is applied, and a surface tre...

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Bibliographische Detailangaben
Hauptverfasser:	OGO, YOSHINORI, AOYAMA, TAKAAKI, MIYAUCHI, MITSUHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTINGELECTRIC POWER COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY GENERATION INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION SYSTEMS FOR STORING ELECTRIC ENERGY
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Beschreibung
Zusammenfassung:	Provided are a power supply device (31) capable of achieving an increase in power density of a substrate (S) being treated and enhancing power efficiency when sequentially treating multiple substrates (S) during surface treatment of the substrates (S) to which a voltage is applied, and a surface treatment machine (1) using the power supply device. The power supply device (31): is used in a surface treatment machine (1) for sequentially surface treating multiple substrates (S); is mounted on a rotating body (22) for supplying electric power to the substrates (S); supplies electric power supplied from a power source (32) to the substrates (S) held on the rotating body (22); and selectively switches between a feeding state and a non-feeding state in accordance with a rotation angle of the rotating body (22).