Substrate delivery method and substrate delivery device
A substrate delivery method by using a substrate delivery device including an elevating body in which a plurality of mounting parts, on which a transport container accommodating a substrate is placed, are arranged vertically and the mounting parts are integrally moved upward and downward, and an ele...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | OBIKANE, TADASHI |
| description | A substrate delivery method by using a substrate delivery device including an elevating body in which a plurality of mounting parts, on which a transport container accommodating a substrate is placed, are arranged vertically and the mounting parts are integrally moved upward and downward, and an elevating mechanism which moves the elevating body upward and downward and moves each of the mounting parts on which the transport container is placed upward and downward to a delivery height position at which the transport container is delivered to and from an external transport mechanism and a loading and unloading height position at which loading and unloading of the substrate is performed between the transport container and a substrate processing part via a transport port provided in the substrate processing part which processes the substrate, wherein the method comprising: a step of loading and unloading the substrate in which one mounting part on which the transport container is placed is positioned at the loadi |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TW202229144A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TW202229144A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TW202229144A3</originalsourceid><addsrcrecordid>eNrjZDAPLk0qLilKLElVSEnNySxLLapUyE0tychPUUjMS1EoxpRNSS3LTE7lYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxIeFGBkZGRpaGJiaOxsSoAQASUy6M</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Substrate delivery method and substrate delivery device</title><source>esp@cenet</source><creator>OBIKANE, TADASHI</creator><creatorcontrib>OBIKANE, TADASHI</creatorcontrib><description>A substrate delivery method by using a substrate delivery device including an elevating body in which a plurality of mounting parts, on which a transport container accommodating a substrate is placed, are arranged vertically and the mounting parts are integrally moved upward and downward, and an elevating mechanism which moves the elevating body upward and downward and moves each of the mounting parts on which the transport container is placed upward and downward to a delivery height position at which the transport container is delivered to and from an external transport mechanism and a loading and unloading height position at which loading and unloading of the substrate is performed between the transport container and a substrate processing part via a transport port provided in the substrate processing part which processes the substrate, wherein the method comprising: a step of loading and unloading the substrate in which one mounting part on which the transport container is placed is positioned at the loadi</description><language>chi ; eng</language><subject>CONVEYING ; HANDLING THIN OR FILAMENTARY MATERIAL ; PACKING ; PERFORMING OPERATIONS ; PNEUMATIC TUBE CONVEYORS ; SHOP CONVEYOR SYSTEMS ; STORING ; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING ; TRANSPORTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220801&DB=EPODOC&CC=TW&NR=202229144A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220801&DB=EPODOC&CC=TW&NR=202229144A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OBIKANE, TADASHI</creatorcontrib><title>Substrate delivery method and substrate delivery device</title><description>A substrate delivery method by using a substrate delivery device including an elevating body in which a plurality of mounting parts, on which a transport container accommodating a substrate is placed, are arranged vertically and the mounting parts are integrally moved upward and downward, and an elevating mechanism which moves the elevating body upward and downward and moves each of the mounting parts on which the transport container is placed upward and downward to a delivery height position at which the transport container is delivered to and from an external transport mechanism and a loading and unloading height position at which loading and unloading of the substrate is performed between the transport container and a substrate processing part via a transport port provided in the substrate processing part which processes the substrate, wherein the method comprising: a step of loading and unloading the substrate in which one mounting part on which the transport container is placed is positioned at the loadi</description><subject>CONVEYING</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>PNEUMATIC TUBE CONVEYORS</subject><subject>SHOP CONVEYOR SYSTEMS</subject><subject>STORING</subject><subject>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDAPLk0qLilKLElVSEnNySxLLapUyE0tychPUUjMS1EoxpRNSS3LTE7lYWBNS8wpTuWF0twMim6uIc4euqkF-fGpxQWJyal5qSXxIeFGBkZGRpaGJiaOxsSoAQASUy6M</recordid><startdate>20220801</startdate><enddate>20220801</enddate><creator>OBIKANE, TADASHI</creator><scope>EVB</scope></search><sort><creationdate>20220801</creationdate><title>Substrate delivery method and substrate delivery device</title><author>OBIKANE, TADASHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TW202229144A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2022</creationdate><topic>CONVEYING</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>PNEUMATIC TUBE CONVEYORS</topic><topic>SHOP CONVEYOR SYSTEMS</topic><topic>STORING</topic><topic>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>OBIKANE, TADASHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OBIKANE, TADASHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Substrate delivery method and substrate delivery device</title><date>2022-08-01</date><risdate>2022</risdate><abstract>A substrate delivery method by using a substrate delivery device including an elevating body in which a plurality of mounting parts, on which a transport container accommodating a substrate is placed, are arranged vertically and the mounting parts are integrally moved upward and downward, and an elevating mechanism which moves the elevating body upward and downward and moves each of the mounting parts on which the transport container is placed upward and downward to a delivery height position at which the transport container is delivered to and from an external transport mechanism and a loading and unloading height position at which loading and unloading of the substrate is performed between the transport container and a substrate processing part via a transport port provided in the substrate processing part which processes the substrate, wherein the method comprising: a step of loading and unloading the substrate in which one mounting part on which the transport container is placed is positioned at the loadi</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_TW202229144A |
| source | esp@cenet |
| subjects | CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| title | Substrate delivery method and substrate delivery device |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T18%3A26%3A13IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=OBIKANE,%20TADASHI&rft.date=2022-08-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ETW202229144A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |