Substrate delivery method and substrate delivery device

A substrate delivery method by using a substrate delivery device including an elevating body in which a plurality of mounting parts, on which a transport container accommodating a substrate is placed, are arranged vertically and the mounting parts are integrally moved upward and downward, and an elevating mechanism which moves the elevating body upward and downward and moves each of the mounting parts on which the transport container is placed upward and downward to a delivery height position at which the transport container is delivered to and from an external transport mechanism and a loading and unloading height position at which loading and unloading of the substrate is performed between the transport container and a substrate processing part via a transport port provided in the substrate processing part which processes the substrate, wherein the method comprising: a step of loading and unloading the substrate in which one mounting part on which the transport container is placed is positioned at the loadi