System for a surface treatment of a substrate with a fluid

The present application relates to a system for a surface treatment of a substrate with a fluid and a method for a surface treatment of a substrate with a fluid. The system for a surface treatment of a substrate with a fluid comprises a substrate holder, a cover, and a treatment chamber. The substra...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OTZLINGER, HERBERT, GLEISSNER, ANDREAS, TSCHINDERLE, ULRICH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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