Method of forming a patterned layer of material

Methods of forming a patterned layer of material are disclosed. In one arrangement, a substrate having a layered structure is provided. The layered structure comprises a base layer, a support layer, and a thermally insulating layer between the base layer and the support layer. The support layer comp...

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Bibliographische Detailangaben
Hauptverfasser: PARAYIL VENUGOPALAN, SYAM, KURGANOVA, EVGENIA, FARAMARZI, VINA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Methods of forming a patterned layer of material are disclosed. In one arrangement, a substrate having a layered structure is provided. The layered structure comprises a base layer, a support layer, and a thermally insulating layer between the base layer and the support layer. The support layer comprises a plurality of sub-units that are thermally insulated from each other. A selected portion of the support layer is selectively irradiated during a pattern-forming process. The irradiation locally drives the pattern-forming process to form a layer of material in a pattern defined by the selected portion.