Semiconductor storage device

To provide a semiconductor storage device that can be manufactured suitably. A semiconductor storage device includes a first region, a second region, and a third region. The first region includes a plurality of first wires extending in a first direction and arranged in a second direction, a pluralit...

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1. Verfasser: ODE, HIROYUKI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:To provide a semiconductor storage device that can be manufactured suitably. A semiconductor storage device includes a first region, a second region, and a third region. The first region includes a plurality of first wires extending in a first direction and arranged in a second direction, a plurality of second wires extending in the second direction and intersecting with the first wires, and a plurality of memory cells provided at intersections between the first wires and the second wires. The second region includes a contact extending in a third direction. The third region includes a plurality of first dummy wires extending in the first direction and arranged in the second direction, and a plurality of second dummy wires extending in the second direction, arranged in the first direction, and intersecting with the first dummy wires. The width in the first direction of one of the second dummy wires that is the closest to the first region or the second region in the first direction is less than or equal to the