Cup-shaped chuck of substrate holding device, and substrate holding device

Disclosed in the present invention is a cup-shaped chuck of a substrate holding device. The cup-shaped chuck comprises an inner pressing ring, a middle frame, a sealing member, an outer pressing ring and a contact ring. The inner pressing ring is locked on the inner peripheral surface of the middle frame. The sealing member has an outer end part, a bottom part and an inner end part; the outer end part of the sealing member covers the outer peripheral surface of at least part of the middle frame; the bottom part of the sealing member covers the bottom part of the middle frame, and is exposed at the outside of the cup-shaped chuck; the inner end part of the sealing member covers the inner peripheral surface of the at least part of the middle frame; the inner end part of the sealing member is pressed between the inner pressing ring and the middle frame by means of the inner pressing ring; the outer pressing ring is made of an insulating material and is locked on the outer peripheral surface of the middle frame,