Load port and EFEM

The purpose of the present invention is to provide a load port capable of increasing airtightness inside an EFEM, reducing the supplied amount of gas used for the EFEM and improving the quality of a wafer.

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NAKANO, TAKAAKI, OCHIAI, MITSUTOSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The purpose of the present invention is to provide a load port capable of increasing airtightness inside an EFEM, reducing the supplied amount of gas used for the EFEM and improving the quality of a wafer.