P-GaN high electron mobility transistor

A p-GaN high electron mobility transistor is provided to solve the problem of direct tunneling and gate electrode leakage current of the conventional p-GaN high electron mobility transistor. The transistor includes a substrate, a channel layer located on the substrate, a supply layer stacked on the...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TAI, MAOOU, CHEN, HONGIH, CHOU, FONG-MIN, CHEN, WENUNG, LIN, YU-SHAN, ZHENG, HAO-XUAN, JIN, FU-YUAN, CHANG, TINGANG, LIN, YUN-HSUAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A p-GaN high electron mobility transistor is provided to solve the problem of direct tunneling and gate electrode leakage current of the conventional p-GaN high electron mobility transistor. The transistor includes a substrate, a channel layer located on the substrate, a supply layer stacked on the channel layer, and a doped layer stacked on the supply layer. A doping concentration of the doped layer is gradually distributed, wherein the doped concentration in a first doped region close to the supply layer is lower than the doped concentration in a second doped region far from the supply layer. A gate electrode is located on the doped layer, a source electrode and a drain electrode are respectively electrically connected to the channel layer and the supply layer.