Electric component connection device for positioning and connecting electric component with substrate and not causing damage to fine electric component

The present invention provides an electric component connection device, which may position and connect an electric component to a substrate with high precision without causing damages to a fine electric component, and may obtain connection quality with high reliability. The electric component connection device of the present invention comprises: a connection head (11) for sucking the electric component (M) on a chuck (20) to have the electric component (M) moved in a vertical direction relative to the substrate (P) in order to connect to the substrate (P); a working table (16) having a heater (18) for sucking the substrate (P) and heating the substrate (P); a chamber (15) for supplying an inert gas (G) from a sidewall portion (23) to a connection processing chamber (22) in which the electric component (M) and the substrate (P) are connected and maintaining the interior at a low oxygen concentration; the electric component (M), which is sucked on the collet (20); and, an upper-lower dual field-of-view camera u