Substrate processing system, substrate processing method, and map creating device

This substrate processing system is provided with a measurement device, a transfer device, a map creating device, and an evaluating device. The measurement device measures an error in a substrate for which a first step has been performed by a first processing device for performing the processing of the first step with respect to a substrate. The transfer device transfers a substrate between a plurality of devices, including the first processing device, a second processing device for performing the processing of a second step which is performed with respect to a substrate after the first step, and the measurement device. The map creating device creates an error map for each substrate indicating an error distribution on the substrate. The evaluating device calculates an evaluation value for each substrate indicating the importance of an error on the basis of the error map. The evaluating device, in accordance with a result of determination as to whether the evaluation value is greater than or equal to a predete