Optical device, method for manufacturing an optical device and method for operating an optical device
Optical device (1) comprising an optical element (10), which is mounted on a carrier (20) by means of a platform (30), - the platform (30) comprises a base (32) and an elastic structure (31), wherein - the base (32) is connected to the optical element (10), the elastic structure (31) connects the ba...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Optical device (1) comprising an optical element (10), which is mounted on a carrier (20) by means of a platform (30), - the platform (30) comprises a base (32) and an elastic structure (31), wherein - the base (32) is connected to the optical element (10), the elastic structure (31) connects the base (32) and the carrier (20), the platform (30) extends along an x-y plane defined by an x-direction (101) and a y-direction (102), an actuator (40) is arranged to apply a force to the base (32) in a direction along the x-y-plane, the elastic structure (31) is elastic in the x-direction (101) and in the y-direction (102), and - the base (32) and the elastic structure (31) are fabricated in a one-piece manner. |
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