Silica dispersion and abrasive composition
A problem addressed is to provide an antibacterial agent-compounded silica dispersion that has an antibacterial property, a slight decrease in polishing rate even when used as a component of an abrasive composition, and a good surface state of a polished substrate. The silica dispersion contains col...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A problem addressed is to provide an antibacterial agent-compounded silica dispersion that has an antibacterial property, a slight decrease in polishing rate even when used as a component of an abrasive composition, and a good surface state of a polished substrate. The silica dispersion contains colloidal silica and an organic compound having a hemiformal structure. The organic compound having a hemiformal structure may be an aliphatic organic compound or an aromatic organic compound, and further, may be formed by combining an aliphatic organic compound and an aromatic organic compound. |
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