Organic film forming apparatus capable of shortening cooling time of a workpiece formed with organic film and maintaining the quality of the organic film

An object of the invention is to provide an organic film forming apparatus capable of shortening cooling time of a workpiece formed with an organic film and maintaining the quality of the organic film. The organic film forming apparatus according to one embodiment can heat the workpiece at an environment in which a pressure is further lower than the atmospheric pressure. The workpiece has a substrate, and a solution containing an organic material and a solvent coated on the upper surface of the substrate. The organic film forming apparatus includes a chamber capable of maintaining the environment where a pressure is further lower than the atmospheric pressure; an exhaust part capable of exhausting gas inside the chamber; at least one temperature controller having an outer tube and a heating part, wherein the outer tube is cylindrical-shape and extended from the outer side of the chamber to the inner side of the chamber so as to be inserted into the chamber by the way of air-tight, and the heating part is disp