Flat Bottom Shadow Ring

In some examples, a flat Bottom Shadow Ring (fBSR) is provided for processing a substrate in a processing chamber. An example fBSR comprises an overhang for covering an edge of the substrate in the processing chamber. The overhang includes a flat zone that extends radially outward over the outer edg...

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Bibliographische Detailangaben
Hauptverfasser:	LIN, FRANK YUN, HAN, JUN HEE, LIU, JIE, CHIANG, CONAN, WEI, LAI, MARTIN, MICHAEL JOHN, KIM, JI SOO, MILLER, ALAN JEFFREY, THIE, WILLIAM
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	In some examples, a flat Bottom Shadow Ring (fBSR) is provided for processing a substrate in a processing chamber. An example fBSR comprises an overhang for covering an edge of the substrate in the processing chamber. The overhang includes a flat zone that extends radially outward over the outer edge of the substrate.