Gas sensor and method for manufacturing the same

A gas sensor is used to solve a problem of the sensitivity of the conventional gas sensor is affected by environment humidity and decay over time. This gas sensor includes a substrate, a heating component on the substrate, a sensing layer covered on the heating component, and two electrodes respecti...

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Bibliographische Detailangaben
Hauptverfasser:	LIN, SHIH-KAI, LIN, CHUNU, TSENG, YI-TING, CHEN, PO-HSUN, CHEN, WENUNG, CHANG, TINGANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A gas sensor is used to solve a problem of the sensitivity of the conventional gas sensor is affected by environment humidity and decay over time. This gas sensor includes a substrate, a heating component on the substrate, a sensing layer covered on the heating component, and two electrodes respectively electrical connected to the sensing layer. The sensing layer includes a doping element. The electronegativity of the dopant element is more than two. A method for manufacturing the gas sensor is also provided. The method includes laminating a heating component, a sensing layer, and two electrodes on a substrate by using deposition, and introducing a dopant air when depositing the sensing layer.